A Highly Miniaturized Dissolved Oxygen Sensor Using a Nanoporous Platinum Electrode Electroplated on Silicon
A highly sensitive and miniaturized dissolved oxygen (DO) sensor with a nanoporous platinum (Pt) electrode on a silicon substrate was recently developed and characterized for use in environmental monitoring and bio/medical sensor applications. The proposed DO sensor was designed with four different layers: the electrodes (a nanoporous Pt working electrode, a plane Pt counter electrode, and a Ag/AgCl reference electrode), a poly(dimethylsiloxane) (PDMS) passivation & electrolyte reservoir, a PDMS film used as a gas permeable membrane, and a PDMS chamber for storing the DO sample. The fabricated DO sensor has a compact size and a volume of 15 mm ¡¿ 8 mm ¡¿ 8.05 mm. The utilized nanoporous Pt working electrode of the DO sensor showed a much larger roughness factor (RF), at 313, than the plane Pt electrode did. At various oxygen concentrations, the fabricated sensor exhibited distinctive response currents, a high oxygen sensitivity of 102.78 nA/ppm, a fast response time of less than 100 sec at -0.8 V vs. Ag/AgCl, and a good reproducibility at room temperature and pressure. We confirmed these excellent results were caused by the highly-roughened catalytic nanoporous Pt electrode.
Similar Publications:
This paper presents a micro-fabricated electromagnetic power generator for an ambient vibration energy harvesting system. The proposed power generator utiliz...
Since most biosensors are based on enzymatic electrochemical analysis, they are disposable due to the use of enzymes that are living creatures. Thus, these a...
Temperature effects on the deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride fil...